Abstract: By using analytical method, the excavation induced ground ground settlement is analyzed. Through surface subsidence Caused by rock-soil excavation and the the relative subsidence caused by distributed load on semi-infinite plane,the ground settlement formular caused by the shallow tunnel excavation across the surface buildings. Through examples given, the feasibility of this method is proved. By using the following method, the influence of the weight of the buildings and the position relations between shallow tunnel and building on ground settlement are analyzed.The results of the study indicate that:The ground settlement caused by the shallow tunnel excavation is increased with the increase of building's weight; the distance of building center to tunnel axis is one of the important factors, that influence of the existing building on ground settlement is negligible when ground building is over a certain range of distance. The research results can provide certain reference for existing similar tunnel engineering.